✦ LIBER ✦
High-precision automatic ellipsometer and whereby evaluation of a very thin silicon-oxide layer
✍ Scribed by Soichi Iwamura; Yasuaki Nishida
- Book ID
- 112074900
- Publisher
- John Wiley and Sons
- Year
- 1984
- Tongue
- English
- Weight
- 750 KB
- Volume
- 67
- Category
- Article
- ISSN
- 8756-6621
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