High Power Pulsed Plasma Enhanced Chemical Vapor Deposition: A Brief Overview of General Concepts and Early Results

✍ Scribed by Lundin, Daniel; Pedersen, Henrik

• Book ID: 121468265
• Publisher: Elsevier
• Year: 2013
• Tongue: English
• Weight: 262 KB
• Volume: 46
• Category: Article
• ISSN: 1875-3892
• DOI: 10.1016/j.phpro.2013.07.039