✦ LIBER ✦
High power fiber laser driver for efficient EUV lithography source with tin-doped water droplet targets
✍ Scribed by Hou, Kai-Chung; George, Simi; Mordovanakis, Aghapi G.; Takenoshita, Kazutoshi; Nees, John; Lafontaine, Bruno; Richardson, Martin; Galvanauskas, Almantas
- Book ID
- 115408667
- Publisher
- Optical Society of America
- Year
- 2008
- Tongue
- English
- Weight
- 342 KB
- Volume
- 16
- Category
- Article
- ISSN
- 1094-4087
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