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High Power Copper Sulfide Cathodes for Thin-Film Microbatteries

โœ Scribed by Mazor, H.; Golodnitsky, D.; Burstein, L.; Peled, E.


Book ID
115547653
Publisher
The Electrochemical Society
Year
2009
Tongue
English
Weight
449 KB
Volume
12
Category
Article
ISSN
1099-0062

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Thin films of lithium cobalt oxide were deposited on Pt or Pt/Ti/quartz glass substrates by radio frequency (RF) magnetron sputtering at the substrate temperatures from room temperature to 500 ยฐC. As the substrate temperature increased, the film structure changed from amorphous structure to crystall