✦ LIBER ✦
High polishing selectivity ceria slurry for formation of top electrode in spin-transfer torque magnetic random access memory
✍ Scribed by Hao Cui; Jae-Hyung Lim; Jin-Hyung Park; Jea-Gun Park
- Book ID
- 118501956
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 744 KB
- Volume
- 522
- Category
- Article
- ISSN
- 0040-6090
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