✦ LIBER ✦
High phosphorus gettering efficiency in polycrystalline silicon by optimisation of classical thermal annealing conditions
✍ Scribed by Loghmarti, M. ;Mahfoud, K. ;Kopp, J. ;Muller, J. C. ;Sayah, D.
- Publisher
- John Wiley and Sons
- Year
- 1995
- Tongue
- English
- Weight
- 449 KB
- Volume
- 151
- Category
- Article
- ISSN
- 0031-8965
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