✦ LIBER ✦
High-performance ultra-small single crystalline silicon microphone of an integrated structure
✍ Scribed by T. Tajima; T. Nishiguchi; S. Chiba; A. Morita; M. Abe; K. Tanioka; N. Saito; M. Esashi
- Book ID
- 114155548
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 710 KB
- Volume
- 67-68
- Category
- Article
- ISSN
- 0167-9317
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