High-performance small-track-width metal-in-gap heads made by reactive-ion etching

✍ Scribed by C.W.M.P. Sillen; J.J.M. Ruigrok; M.G.J. Vepřek-Heijman; A.J.G. Bode-Fassbender; J.B. Giesbers

• Book ID: 113315323
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 216 KB
• Volume: 83
• Category: Article
• ISSN: 0304-8853
• DOI: 10.1016/0304-8853(90)90426-q