✦ LIBER ✦
High performance poly-Si TFTs fabricated using pulsed laser annealing and remote plasma CVD with low temperature processing
✍ Scribed by Kohno, A.; Sameshima, T.; Sano, N.; Sekiya, M.; Hara, M.
- Book ID
- 114536041
- Publisher
- IEEE
- Year
- 1995
- Tongue
- English
- Weight
- 673 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0018-9383
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