✦ LIBER ✦
High performance EUV multilayer structures insensitive to capping layer optical parameters
✍ Scribed by Suman, Michele; Monaco, Gianni; Nicolosi, Piergiorgio; Windt, David L.; Pelizzo, Maria Guglielmina
- Book ID
- 115409861
- Publisher
- Optical Society of America
- Year
- 2008
- Tongue
- English
- Weight
- 204 KB
- Volume
- 16
- Category
- Article
- ISSN
- 1094-4087
No coin nor oath required. For personal study only.