✦ LIBER ✦
High performance contact formation in LSI circuit restructuring using visible pulse laser induced ablation and CVD
✍ Scribed by Y. Morishige; S. Kitamura; S. Kishida
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 437 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0169-4332
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