✦ LIBER ✦
High-performance cell transistor design using metallic shield embedded shallow trench isolation (MSE-STI) for Gbit generation DRAM's
✍ Scribed by Jai-Hoon Sim; Jae-Kyu Lee; Kinam Kim
- Book ID
- 114537749
- Publisher
- IEEE
- Year
- 1999
- Tongue
- English
- Weight
- 253 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0018-9383
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