✦ LIBER ✦
High-performance and damage-free plasma etching processes for future ULSI patterning
✍ Scribed by Seiji Samukawa
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 628 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0167-9317
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