Prepared Low Stress Cubic Boron Nitride
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P.W. Zhu; Y.N. Zhao; B. Wang; Z. He; D.M. Li; G.T. Zou
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Article
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2002
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Elsevier Science
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English
โ 158 KB
We present low stress cubic boron nitride (cBN) films with a transition layer deposited on the metal alloy substrates by tuned substrate radio-frequency magnetron sputtering. The films were characterized by Fourier transform infrared spectroscopy and transmission electron microscopy (TEM). The IR pe