High-intensity Si cluster ion emission from a silicon target bombarded with large Ar cluster ions

✍ Scribed by Satoshi Ninomiya; Takaaki Aoki; Toshio Seki; Jiro Matsuo

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 223 KB
• Volume: 252
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2006.02.100