✦ LIBER ✦
High-intensity oxygen cluster ion beam generation and its application to cluster ion-assisted deposition
✍ Scribed by Matsuo, J.; Minami, E.; Saito, M.; Toyoda, N.; Katsumata, H.; Yamada, I.
- Book ID
- 113055982
- Publisher
- Springer
- Year
- 1999
- Tongue
- English
- Weight
- 165 KB
- Volume
- 9
- Category
- Article
- ISSN
- 1434-6060
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