High intensity hydrogen lamp employing helicon wave plasma and its application to Si and SiO2 etching

✍ Scribed by Ghoki Sadakuni; Akihiro Kojima; Hiroyuki Sakaue; Yasuhiro Horiike

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 562 KB
• Volume: 79-80
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(94)90461-8