✦ LIBER ✦
High frequency performance of Ta-Al-N capacitors made with an aluminum underlayer
✍ Scribed by P.K. Reddy; S.R. Jawalekar
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 307 KB
- Volume
- 109
- Category
- Article
- ISSN
- 0040-6090
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