✦ LIBER ✦
High-energy negative ion beam obtained from pulsed inductively coupled plasma for charge-free etching process
✍ Scribed by Vozniy, O. V.; Yeom, G. Y.
- Book ID
- 111958636
- Publisher
- American Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 565 KB
- Volume
- 94
- Category
- Article
- ISSN
- 0003-6951
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