✦ LIBER ✦
High energy ion implantation for profiled tub formation and impurity gettering in deep submicron CMOS technology
✍ Scribed by D.C. Jacobson; A. Kamgar; D.J. Eaglesham; E.J. Lloyd; S.J. Hillenius; J.M. Poate
- Book ID
- 113284959
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 445 KB
- Volume
- 96
- Category
- Article
- ISSN
- 0168-583X
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