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High-Efficiency Neutral-Beam Generation by Combination of Inductively Coupled Plasma and Parallel Plate DC Bias

✍ Scribed by Samukawa, Seiji; Sakamoto, Keisuke; Ichiki, Katsunori


Book ID
126241557
Publisher
Institute of Pure and Applied Physics
Year
2001
Tongue
English
Weight
60 KB
Volume
40
Category
Article
ISSN
0021-4922

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