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High-efficiency collector design for extreme-ultraviolet and x-ray applications

✍ Scribed by Zocchi, Fabio E.


Book ID
115353237
Publisher
The Optical Society
Year
2006
Tongue
English
Weight
450 KB
Volume
45
Category
Article
ISSN
1559-128X

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New methods of surface-sensitive instrumentation for the diagnostics of extreme ultraviolet (EUV), soft x-ray (SXR) and x-ray radiation have been developed. In particular, these methods of instrumentation are of great importance for studies of the interaction of electron, ion and photon beams with m