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High-efficiency cluster laser vaporization sources based on Ti: sapphire lasers

✍ Scribed by M. Pellarin; E. Cottancin; J. Lermé; J.L. Vialle; J.P. Wolf; M. Broyer; V. Paillard; V. Dupuis; A. Perez; J.P. Perez; J. Tuaillon; P. Melinon

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
667 KB
Volume
224
Category
Article
ISSN
0009-2614

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✦ Synopsis

A new laser vaporization source based on a flashlamp-pumped Ti : sapphire laser has been used to produce cluster beams. Its pcrformancc is compared to the standard cluster sources based on ncodyme YAG lasers. We show that the Ti : sapphire source is much more efficient: the clusters deposition rates arc about 30 times higher, and larger clusters arc produced. Finally the quality of nanostructured films is comparable to those obtained by the standard source, but the time deposition is 30 times shorter. This opens new possibilities for film growth by cluster deposition.

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