High dose implantation of yttrium and barium ions into copper: the use of a sacrificial carbon layer for enhanced retention

✍ Scribed by L. Clapham; J.L. Whitton; D. Rück

• Book ID: 113284714
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 309 KB
• Volume: 80-81
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(93)96169-d