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High-diffractive-efficiency defocus grating for wavefront curvature sensing

โœ Scribed by Fengjie, Xi; Zongfu, Jiang; Xiaojun, Xu; Yifeng, Geng

Book ID
115391090
Publisher
Optical Society of America
Year
2007
Tongue
English
Weight
220 KB
Volume
24
Category
Article
ISSN
1084-7529

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Two generations of transmission molybdenum gratings are realized; the first one made with laser interference lithography (LIL) has 300 nm period and the second one made with extreme UV interference lithography (EUV-IL) using the first one has 150 nm period. This technique is a good alternative to e-