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High depth resolution analysis of Si/SiGe multilayers with the atom probe

✍ Scribed by Koelling, Sebastian; Gilbert, Matthieu; Goossens, Jozefien; Hikavyy, Andriy; Richard, Olivier; Vandervorst, Wilfried

Book ID: 118116937
Publisher: American Institute of Physics
Year: 2009
Tongue: English
Weight: 761 KB
Volume: 95
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.3243461

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