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High-deposition-rate growth of PZT thin films by reactive electron beam coevaporation using Ti/Zr alloy

✍ Scribed by Mochizuki, Shoichi; Mihara, Toshiyuki; Ishida, Tadashi


Book ID
126642773
Publisher
Taylor and Francis Group
Year
1996
Tongue
English
Weight
246 KB
Volume
12
Category
Article
ISSN
1058-4587

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