High density plasma sources : design, ph
β Oleg A Popov
π Library
π
1995
π Noyes Publications
π English
β¦ LIBER β¦
π
High Density Plasma Sources. Design, Physics and Performance
β Scribed by Oleg A. Popov (Eds.)
- Publisher
- Noyes Publications
- Year
- 1995
- Tongue
- English
- Leaves
- 453
- Series
- Materials science and process technology series., Electronic materials and process technology
- Category
- Library
β¬ Acquire This Volume
No coin nor oath required. For personal study only.
β¦ Synopsis
Content:
Preface, Pages vii-xii, Oleg A. Popov
Contributors, Pages xiii-xiv
1 - Helicon Plasma Sources, Pages 1-75, Francis F. Chen
2 - Planar Inductive Sources, Pages 76-99, John C. Forster, John H. Keller
3 - Electrostatically-Shielded Inductively-Coupled RF Plasma Sources, Pages 100-148, Wayne L. Johnson
4 - Very High Frequency Capacitive Plasma Sources, Pages 149-190, Michael J. Colgan, M. Meyyappan
5 - Surface Wave Plasma Sources, Pages 191-250, Michel Moisan, JoΓ«lle Margot, Zenon Zakrzewski
6 - Microwave Plasma Disk Processing Machines, Pages 251-311, Jes Asmussen
7 - Electron Cyclotron Resonance Plasma Sources, Pages 312-379, James E. Stevens
8 - Distributed ECR Plasma Sources, Pages 380-425, Jacques Pelletier
Index, Pages 426-445
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