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High-density phenomena in hydrogen plasma

โœ Scribed by V. S. Filinov; M. Bonitz; V. E. Fortov


Book ID
110125257
Publisher
SP MAIK Nauka/Interperiodica
Year
2000
Tongue
English
Weight
88 KB
Volume
72
Category
Article
ISSN
0021-3640

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๐Ÿ“œ SIMILAR VOLUMES


High density large area hydrogen plasma
โœ Jeonghee Cho; Jack Yang; Haejung Park; Se-Geun Park ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 316 KB

Hydrogen plasma becomes an alternative to the conventional oxygen plasma in stripping photoresist in the next generation semiconductor processing because the conventional oxygen plasma is known to degrade ultralow dielectric constant films by depleting carbons from the films. An array of hollow cath