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High density and through wafer copper interconnections and solder bumps for MEMS wafer-level packaging

✍ Scribed by C.-J. Lin; M.-T. Lin; S.-P. Wu; F.-G. Tseng


Book ID
106184687
Publisher
Springer-Verlag
Year
2004
Tongue
English
Weight
447 KB
Volume
10
Category
Article
ISSN
0946-7076

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