High damage threshold HfO2/SiO2multilayer mirrors deposited by novel remote plasma sputtering

✍ Scribed by Ying Xu; Nan Chen; Yi-kun Bu

• Book ID: 113090510
• Publisher: Tianjin University of Technology
• Year: 2011
• Tongue: English
• Weight: 396 KB
• Volume: 7
• Category: Article
• ISSN: 1673-1905
• DOI: 10.1007/s11801-011-1058-z