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High current FIB system for micromechanics application

โœ Scribed by L. Bischoff; E. Hesse; G. Hofmann; F.K. Naefring; W. Probst; B. Schmidt; J. Teichert

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
304 KB
Volume
21
Category
Article
ISSN
0167-9317

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๐Ÿ“œ SIMILAR VOLUMES

Novel charge neutralization techniques a
Novel charge neutralization techniques applicable to wide current range of FIB processing in FIB-SEM combined system
โœ Hirotaka Komoda; Masaaki Yoshida; Yoh Yamamoto; Kouji Iwasaki; Ikuko Nakatani; H ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 513 KB

FIB-induced charging is one of the most critical issues for achieving successful circuit modifications of LSI. We have developed novel charge neutralization techniques applicable to a wide current range (from pico to nanoampere-order) of FIB processing in a FIB-SEM combined system. The method utiliz