High crystalline quality titanium disilicides formed by sputter deposition of Ti⧹Si multilayers and annealing

✍ Scribed by P Revva; A Kastanas; A. Travlos; AG Nassiopoulou

• Book ID: 104266053
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 328 KB
• Volume: 51
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(98)00098-0