✦ LIBER ✦
High conductivity silicide on polycrystalline silicon prepared by lift-off-reactive sputter etching
✍ Scribed by E. Kinsbron; D.B. Fraser; F. Vratny
- Book ID
- 103425713
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 62 KB
- Volume
- 90
- Category
- Article
- ISSN
- 0040-6090
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