High aspect ratio spiral and vertical meander micro coils for actuator applications

✍ Scribed by V. Seidemann; T. Kohlmeier; M. Föhse; H. H. Gatzen; S. Büttgenbach

• Publisher: Springer-Verlag
• Year: 2004
• Tongue: English
• Weight: 418 KB
• Volume: 10
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-004-0398-z