✦ LIBER ✦
High-aspect-ratio microstructures fabricated by X-ray lithography of polymethylsilsesquioxane-based spin-on glass thick films
✍ Scribed by Y. Liu; T. Cui; P. J. Coane; M. J. Vasile; J. Goettert
- Publisher
- Springer-Verlag
- Year
- 2003
- Tongue
- English
- Weight
- 103 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0946-7076
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