✦ LIBER ✦
High aspect ratio micromachining by synchrotron radiation direct photo-etching
✍ Scribed by T. Katoh; Y. Zhang
- Publisher
- Springer-Verlag
- Year
- 1998
- Tongue
- English
- Weight
- 656 KB
- Volume
- 4
- Category
- Article
- ISSN
- 0946-7076
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