✦ LIBER ✦
High activity of B during solid-phase epitaxy in a pre-amorphized layer formed by Ge ion implantation and deactivation during a subsequent thermal process
✍ Scribed by Suzuki, K.; Tashiro, H.; Narita, K.; Kataoka, Y.
- Book ID
- 114617412
- Publisher
- IEEE
- Year
- 2004
- Tongue
- English
- Weight
- 254 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0018-9383
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