✦ LIBER ✦
High accuracy measurement of the residual air gap thickness of thin-film and solid-spaced filters assembled by optical contacting
✍ Scribed by Johan Floriot; Fabien Lemarchand; Laetitia Abel-Tiberini; Michel Lequime
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 186 KB
- Volume
- 260
- Category
- Article
- ISSN
- 0030-4018
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