✦ LIBER ✦
Heterodyne interferometric technique for displacement control at the nanometric scale
✍ Scribed by Topcu, Suat; Chassagne, Luc; Haddad, Darine; Alayli, Yasser; Juncar, Patrick
- Book ID
- 120656579
- Publisher
- American Institute of Physics
- Year
- 2003
- Tongue
- English
- Weight
- 369 KB
- Volume
- 74
- Category
- Article
- ISSN
- 0034-6748
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