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Hetero-epitaxial growth of the cubic single crystalline HfO2 film as high k materials by pulsed laser ablation

✍ Scribed by Xinqiang Zhang; Hailing Tu; Xiaona Wang; Yuhua Xiong; Mengmeng Yang; Lei Wang; Jun Du


Book ID
108166114
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
410 KB
Volume
312
Category
Article
ISSN
0022-0248

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