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Helium gas mixing in nitrogen plasma for the control of the acceptor concentration in p-ZnSe

✍ Scribed by M. Kobayashi; H. Tosaka; T. Nagatake; T. Yoshida; A. Yoshikawa

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
285 KB
Volume
138
Category
Article
ISSN
0022-0248

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