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Helium-charged titanium films deposited by direct current magnetron sputtering

โœ Scribed by Liqun Shi; Chaozhuo Liu; Shilin Xu; Zhu Ying Zhou


Book ID
108287719
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
460 KB
Volume
479
Category
Article
ISSN
0040-6090

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