Helium bubbles in silicon: Study of the residual helium content using elastic recoil detection analysis

✍ Scribed by J.R. Kaschny; P.F.P. Fichtner; A. Muecklich; U. Kreissig; R.A. Yankov; W. Skorupa

• Book ID: 114169647
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 364 KB
• Volume: 136-138
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(97)00713-1