✦ LIBER ✦
Heavy ion microlithography — a new tool to generate and investigate submicroscopic structures
✍ Scribed by Bernd Eberhard Fischer; Reimar Spohr
- Publisher
- Elsevier Science
- Year
- 1980
- Weight
- 746 KB
- Volume
- 168
- Category
- Article
- ISSN
- 0029-554X
No coin nor oath required. For personal study only.