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Heat losses in a CVD reactor for polysilicon production: Comprehensive model and experimental validation

✍ Scribed by Ramos, A.; Rodríguez, A.; del Cañizo, C.; Valdehita, J.; Zamorano, J.C.; Luque, A.

Book ID
124141881
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
673 KB
Volume
402
Category
Article
ISSN
0022-0248

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