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Heat and mass-transfer modeling of an angled gas-jet LCVD system

✍ Scribed by C. Duty; R. Johnson; J. Gillespie; A. Fedorov; J. Lackey

Publisher: Springer
Year: 2003
Tongue: English
Weight: 643 KB
Volume: 77
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-002-1887-5

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