✦ LIBER ✦
Healing of voids in the aluminum metallization of integrated circuit chips : Edward F. Cuddihy, Russel A. Lawton and Thomas R. Gavin. IEEE Trans. Reliab.39(5), 564 (1990)
- Book ID
- 103287583
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 129 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0026-2714
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