✦ LIBER ✦
He plasma pretreatment effects on oxygen plasma-induced carbon loss and surface roughening in an ultralow- k organosilicate glass film
✍ Scribed by Behera, Swayambhu P; Wang, Qing; Kelber, Jeffry A
- Book ID
- 121427787
- Publisher
- Institute of Physics
- Year
- 2011
- Tongue
- English
- Weight
- 894 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0022-3727
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