✦ LIBER ✦
HCl-free selective epitaxial Si-Ge growth by LPCVD for high-frequency HBTs
✍ Scribed by Kiyota, Y.; Udo, T.; Hashimoto, T.; Kodama, A.; Shimamoto, H.; Hayami, R.; Ohue, E.; Washio, K.
- Book ID
- 114539062
- Publisher
- IEEE
- Year
- 2002
- Tongue
- English
- Weight
- 271 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0018-9383
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